Electronic Fume Extraction Solutions for Semiconductor Industry

Why the Semiconductor Industry Needs Point-of-Use Fume Capture

Semiconductor production is built on keeping particles away from the product. A single particle on a wafer, die or bond pad can be enough to cause a defect, and every defect costs yield. Yet many steps around the wafer create fumes and particles of their own: laser scribing and marking of wafers and packages, micro-soldering of modules, die attach and epoxy dispensing, and the rework and inspection work in failure analysis labs.

Facility exhaust and abatement systems handle the process gases from etching and deposition tools. The fumes produced at a laser tool, a soldering bench or a dispensing station are different: they form at a single point, close to the operator and the product, and they are best captured right there before they spread into the room.

Electronic Fume Extraction at the Tool and the Bench

Electronic fume extraction places a nozzle, arm or hood at the point where the fume forms, draws it into a filter unit and returns the cleaned air to the room. Because nothing is ducted outside, the extractor can sit next to the tool or under the bench, and the room’s own air handling is not disturbed.

In the semiconductor industry this means a laser fume extractor connected directly to each laser scribing or marking tool, and compact bench extractors at micro-soldering, rework and dispensing stations.

Why Ultrafine Particles Set the Filter Choice

Semiconductor fumes are dominated by very small particles and organic vapours, so the filter set must deal with both:

• Pre-filter: a deep-pleated pre-filter captures the bulk of the debris from laser scribing and marking and protects the filters behind it.
• HEPA filter: captures the ultrafine particles in laser plume and solder smoke that would otherwise drift back towards wafers, optics and inspection tools.
• Activated carbon: adsorbs the vapours and odours from flux, epoxies, adhesives and package materials.

Built for Fabs, Packaging Lines and Labs

The equipment covers laser tools, assembly benches and lab work in semiconductor plants and research centres.

Wafer scribing and dicing streets

The M-Solv picosecond micro-scribing machine scribes silicon and GaAs wafers, dicing streets and thin films with features below 10 µm, using UV or fibre lasers from 5 to 50 W.

A stand-alone extractor beside the tool

The AD Oracle SA iQ is a self-contained laser fume extractor at 380 m³/hr and below 60 dBA, with a brushed stainless steel or powder-coated cabinet and iQ filter monitoring.

Higher airflow for larger laser tools

The AD 1000 iQ delivers 850 m³/hr from a dual blower, with HEPA and carbon filtration, iQ diagnostics, data logging and automatic flow control.

Micro-soldering and rework benches

The T1 Compact serves a single soldering, rework or inspection bench at below 56 dBA, in a 5 kg unit that fits on or under the bench.

Building a Complete Semiconductor Fume Extraction Setup

Laser scribing of wafers, thin films and dicing streets is carried out on the Picosecond Laser Micro-Scribing Machine from M-Solv. Each laser tool of this kind is connected to the AD Oracle SA iQ, a stand-alone extractor with HEPA and carbon filtration that sits beside the machine. Larger laser cells, or two tools sharing one unit, use the AD 1000 iQ for higher airflow. Micro-soldering, rework and failure analysis benches are covered by the T1 Compact, and genuine BOFA replacement filters for every unit are supplied from India.

Who Uses It

• Semiconductor assembly, test and packaging (ATMP and OSAT) units
• Chip, power device and compound semiconductor manufacturers
• Display, sensor and MEMS fabrication plants
• Failure analysis and reliability laboratories
• Semiconductor research groups at IITs, CSIR laboratories and research institutes

Supply and Support in India

United Spectrum Instruments (USI), Chennai, supplies electronic fume extraction for the semiconductor industry in India as the authorised distributor of Donaldson BOFA and the distributor of M-Solv, together with genuine replacement filters for every unit.

Sourcing the complete setup from one supplier gives semiconductor teams a single point of contact for matching each extractor to its tool or bench, filter selection, installation and after-sales support.

Request a Configuration

Download the brochure from this page, use the Enquire Now button, write to sales@unitedspectrum.in, or call +91 93631 83748 / +91 97899 04948. Please mention:

• Laser tools to be extracted, with their type and power
• Number of micro-soldering, rework and dispensing benches
• Materials and processes involved (wafers, epoxies, flux, package materials)
• Cleanroom class or any room air requirements